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Large Specimen Chamber Variable Pressure SEM

This product is available from Milexia France and Milexia Iberica

The Hitachi SU3800 SEM incorporates a new technology called “IFT” (Intelligent Filament Technology) which allows the user to work with a constant and extremely stable emission current for all acceleration voltages. In addition, the software provides real-time information on the remaining filament life.

The lifetime is typically increased by a factor of 3.



The carefully designed ergonomics ensure easy access to the microscope’s functions, either via the control panel or via the software. Numerous automatic functions are available to maximise productivity.

The control electronics of the five-sector, high-sensitivity BSE detector and the optional UVD II detector for variable pressure mode have been optimised to allow fast-speed sample viewing in real time, as is already the case with the Everhart-Thornley SE secondary electron detector.

The chamber has numerous access ports for additional equipment (EDS, WDS, EBSD, Cryo, STEM detector, etc.), the stage is motorised on 5 continuous axes and is compucentric in inclination and rotation.

Finally, an optical camera integrated in the chamber allows to obtain an image of the sample during the pumping of the chamber, to move in real time to select the region of interest and to superimpose the optical and electronic images with a transparency factor adjustable by the user.

Features and variations

  • Resolutions guaranteed on site in “high vacuum” mode: 3.0 nm at 30 kV and 15.0 nm at 1 kV (SED)
  • Resolution guaranteed on site in “controlled vacuum” mode: 4.00 nm at 30 kV
  • Acceleration voltage: 0.3kV to 30kV
  • Magnifications: x5 to x800,000
  • “Controlled vacuum” mode: 6 Pa to 650 Pa
  • Motorized eucentric stage on 5 axes (Tilt from -20° to +90°, Observable diameter: 130 mm)
  • Samples up to 200mm in diameter, max height 80mm at analytical distance
  • Dry pumping system (turbomolecular pump with magnetic bearings)
  • No water supply required


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