Choose another country or region to see content specific to your location.



Ultra-high Resolution Scanning Electron Microscope

This product is available from Milexia France

The CFE Gun technology featured in the SU9000 achieves the highest SEM resolution in the world. (0.4nm at 30kV).

The reduced aberration effects make high resolution, low accelerating voltage observations possible for beam sensitive materials without the need for deceleration technology. (1.2nm at 1kV )

The SU9000 also features STEM (option) performance that guarantees 0.34nm resolution as confirmed through the imaging of graphite lattice ( (002) d=0.34nm)

Hitachi is bringing superior fundamental performance such as stable operation, high throughput, and high resolution to the forefront of technology.

The Hitachi SU9000 in-lens SEM is dedicated to ultra high resolution (UHR SEM).

With unrivalled performance, it meets the requirements of high-tech laboratories: failure analysis teams in the semiconductor industry, or those working on the characterisation of nano-materials, use Hitachi UHR in-lens SEMs 

Features and variations

  • Guaranteed on-site resolution: 0.4nm at 30kV (SE) and 1.2nm at 1kV (SE) and 0.34nm at 30kV (STEM)
  • Cold emission
  • Acceleration voltage: 0.5 kV to 30 kV
  • Magnification range: x80 to x8,000,000
  • Samples up to 9mm square
  • SE, BSE in-lens detectors
  • STEM (Bright Field, Dark Field) detector with variable solid angle

Ask our experts

Our team of experts are here to help.
Send us your enquiry and we'll get back to you.