Physical Electronics (PHI) PHI Genesis
Fully Automated Multi-Technique Scanning XPS/HAXPES Microprobe
SU5000 Field emission & variable pressure scanning electron microscope
This product is available from Milexia France
The Hitachi SU5000 hot cathode field effect SEM combines the advantages of variable pressure and high resolution.
Its analytical chamber allows the simultaneous adaptation of a wide range of equipment including EDS, WDS, EBSD and Cathodoluminescence.
Features and variations
- Guaranteed resolution: 1.2 nm at 30kV / secondary vacuum
- Guaranteed resolution: 3 nm at 15 kV / primary vacuum
- Schottky emission
- Probe current: up to 200nA
- Acceleration voltage: 0.1kV to 30kV (optional)
- Chamber pressure range: up to 300 Pa
- High displacement eucentric sample stage, motorised in all five axes
- SE, BSE and UVD detectors*, In-Lens (optional)
